Photonic Integrated Piezo-MEMS (Pip-MEMS) Device for 1D Beam Scanning
| dc.contributor.author | Venkatachalam, P. | |
| dc.contributor.author | Yumnam, D. | |
| dc.contributor.author | Gali, S. | |
| dc.contributor.author | Swamy, K.B.M. | |
| dc.contributor.author | Selvaraja, S.K. | |
| dc.date.accessioned | 2026-02-06T06:34:05Z | |
| dc.date.issued | 2024 | |
| dc.description.abstract | We demonstrate a 1D beam scanning device with a maximum scan angle of 6.6° at 18.91 kHz for a 0.5 mm long PZT-on-SiN waveguide integrated Piezo-MEMS cantilever. © The Author(s), under exclusive license to Springer Nature Switzerland AG 2024. | |
| dc.identifier.citation | Springer Proceedings in Physics, 2024, Vol.402, , p. 284-288 | |
| dc.identifier.issn | 9308989 | |
| dc.identifier.uri | https://doi.org/10.1007/978-3-031-63378-2_47 | |
| dc.identifier.uri | https://idr.nitk.ac.in/handle/123456789/29034 | |
| dc.publisher | Springer Science and Business Media Deutschland GmbH | |
| dc.subject | Beam Scanning | |
| dc.subject | Cantilever | |
| dc.subject | Waveguide | |
| dc.title | Photonic Integrated Piezo-MEMS (Pip-MEMS) Device for 1D Beam Scanning |