Photonic Integrated Piezo-MEMS (Pip-MEMS) Device for 1D Beam Scanning
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Date
2024
Journal Title
Journal ISSN
Volume Title
Publisher
Springer Science and Business Media Deutschland GmbH
Abstract
We demonstrate a 1D beam scanning device with a maximum scan angle of 6.6° at 18.91 kHz for a 0.5 mm long PZT-on-SiN waveguide integrated Piezo-MEMS cantilever. © The Author(s), under exclusive license to Springer Nature Switzerland AG 2024.
Description
Keywords
Beam Scanning, Cantilever, Waveguide
Citation
Springer Proceedings in Physics, 2024, Vol.402, , p. 284-288