METHOD AND COMPOSITION FOR FABRICATING A HIGH-K DIELECTRIC MATERIAL
Date
2021-05-28
Authors
National Institute of Technology Karnataka
Jagannathan T. K.
Kishor Kumar M. J
Journal Title
Journal ISSN
Volume Title
Publisher
Indian Patent Office, Chennai
Abstract
Description
Patent Filed Date: 23.11.2019 ; Published Date: 28.05.2021
Keywords
COMPOSITION, FABRICATING, HIGH-K DIELECTRIC MATERIAL