Improved tri-gate FinFET transistor with InGaAs

Abstract

Inclusion of the III-V semiconductors in Field Effect Transistor technology is frequent, now days. In this paper, a tri-gate FinFET using InGaAs is proposed. Current carrying capability of the FinFET is usually large, since tri-gate structure, hence an appropriate doping in the channel would improve the ON and OFF characteristics of the device. To get an excellent I<inf>ON</inf>/I<inf>off</inf>, doping concentration in the channel and source/drain region is varied according to material requirements. Channel length L<inf>g</inf> of the proposed device is 20 nm. With high-K dielectric H fO<inf>2</inf> as oxide, metal gate-oxide stack in the FinFET is designed and simulations are performed. Simulation of FinFET with gate-oxide thickness t<inf>ox</inf> = 1 nm and a channel width W<inf>c</inf> = 10nm, exhibits I<inf>on</inf>/I<inf>off</inf> = 10.801 × 103, subthreshold slope SS ≈ 62 mV/decade and drain-induced-barrier-lowering DIBL = 83.3 mV/V. © 2017 IEEE.