Conference Papers
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Item Modeling and analysis of a SWCNT piezoresistive pressure sensor(2013) Bangera, A.E.; Kulkarni, S.The paper considers modeling and analysis of a circular diaphragm Single Walled Carbon Nanotube (SWCNT) piezoresistive pressure sensor using COMSOL Multiphysics. Initially, the analysis of piezoresistivity in SWCNT by the application of strain is done both by analytical and numerical approach using MATLAB and COMSOL respectively. It is observed that both results are comparable. Thus, the analysis of the structural deformation of the piezoresistive SWCNT placed above the diaphragm which results in the change of resistance in SWCNT, which is in direct accordance with the applied pressure is performed in COMSOL Multiphysis. The simulations show that the results obtained are linear and the sensitivity of the sensor is adequate. © 2013 IEEE.Item Effect of flexure beam geometry and material on the displacement of piezo actuated diaphragm for micropump(Institute of Physics Publishing helen.craven@iop.org, 2018) Roopa, R.; Karanth P, K.P.; Kulkarni, S.M.In this paper, we present a COMSOL analysis of flexure diaphragm for piezo actuated valveless micropump. Diaphragms play an important role in micropumps, till now plane diaphragms are commonly used in micropumps. Use of compliant flexure hinges in diaphragm and other MEMS application is one of the new approach to achieving high deflection in diaphragm at low operating voltage. Flexures hinges in diaphragm acts as simply supported beam. Out-off plane compliance value and stiffness is considered for the selection of proper flexure for diaphragm. Diaphragm material also plays an important role in the diaphragm central deflection. Factor considered for diaphragm material selection is resilience; it is the ratio of yield stress to static modulus. Higher is the resilience will leads to higher deflection generated, it also imparts good compliance. Based on the resilience beryllium copper, stainless steel and brass materials are selected for diaphragm analysis. Simulations have been performed using COMSOL multiphysics. This study reports the effect of flexure hinge geometry and diaphragm material on the central deflection of diaphragms and compared with existing plane diaphragm. Simulation results illustrates that the deflection of three flexure diaphragm with 2mm width and 2mm length flexure is 6.75μm for stainless steel, 10.89 for beryllium copper and 12.10μm for brass, at 140V which is approximately twice that of plane diaphragm deflection. The maximum in both plane and three flexure diaphragm deflection is obtained for brass diaphragm compared to stainless steel and beryllium copper. © Published under licence by IOP Publishing Ltd.Item Effect of flexure hinge geometry on central deflection of piezo actuated diaphragm for micropump(Institute of Electrical and Electronics Engineers Inc., 2018) Roopa, R.; Karanth P, K.P.; Kulkarni, S.M.This paper discusses the effect of flexure hinge geometry on piezo actuated diaphragms for the micropump application. Use of flexure hinges in the diaphragm is one of the approaches to increase the diaphragm central deflection, selection of proper flexure hinges for out-of-plane application is important. COMSOL analysis is used to study the effect of flexure hinge geometry on the central deflection and stress distribution in the diaphragm. Rectangle hinge, circular cut-out hinge and corner fillet flexure hinges were chosen with a constant width of 1.5mm and 2mm length. In the present investigation, the central deflection of the diaphragm with different flexure hinges are studied and compared with a plane diaphragm with respect to actuating voltage. The simulation result shows that the maximum deflection is obtained from circular cut-out flexure diaphragm i.e. 9.35μm. Whereas stress distribution in circular flexure hinge diaphragm is more compared to rectangular flexure hinge diaphragm, which may lead to failure. Therefore rectangular flexure diaphragm has the advantage of minimum stress concentration with higher deflection compared to corner fillet and circular flexure. The deflection of rectangle flexure hinge diaphragm is 8.65μm which is 64% more compared to plane diaphragm. © 2017 IEEE.Item Analysis of Miniaturized Acoustic Transducer for Cell-Lysis(Institute of Electrical and Electronics Engineers Inc., 2018) Matey, Y.; Sri Charan, A.; Kulkarni, S.M.A model of sonar emitter used in underwater navigation is considered. The model is miniaturized and the effect of the operation on total acoustic pressure and directivity index is analysed using COMSOL Multiphysics®. Effect of two different acoustic head geometries is studied. AC voltage is applied to piezoelectric actuator present in the model. Effect of changing frequency is studied. Depending on the results obtained, it was concluded that the miniaturized sonar emitter model is more suitable for cell disruption for cell organelle extraction rather than in cancer cell ablation. And also, the model with tapered acoustic head geometry showed better results. © 2018 IEEE.Item Study and Optimization of Piezoelectric Materials for MEMS Biochemical Sensor Applications(Springer Science and Business Media Deutschland GmbH, 2022) Nagaraj, M.J.; Shantha, V.; Nishanth, N.; Parthsarathy, V.Piezoelectric materials have been broadly used in many scientific applications, and they are often entrenched in electronic systems. Piezoelectric biochemical sensors consists of a cluster of diagnostic devices that works on the principle of affinity interaction, recording the piezoelectric effect. Piezoelectric effect is a phenomenon of inducing voltage when a material is stressed mechanically, i.e. mechanical energy is getting converted to electrical energy, or piezoelectric crystal is a part of the sensor which operates based on the theory of resonance frequency of microcantilever that changes due to attraction of the required mass on the piezoelectric crystal plane. In this paper, the piezoelectric material was optimized for the biochemical sensor by using COMSOL multiphysics finite element analysis software. In solid-state principle, the static study was carried on different piezoelectric material embedded on the microcantilever to optimize the piezoelectric material which will induce more voltage and to sense lower biochemical concentration on the surface of microcantilever. From the analysis carried, it was observed that the electric potential obtained is more in quartz material compared to other materials. © 2022, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.Item Analysis of Suspension Beams for MEMS Accelerometers: The Effect of Geometric Parameters on the Sensitivity(Institute of Electrical and Electronics Engineers Inc., 2024) Manvi, M.; Mruthyunjaya Swamy, K.B.MEMS accelerometers have revolutionized accelerometer technology with their compact size, low power consumption and improved precision, making them suitable for measuring the motion and vibration. MEMS accelerometers rely on the movement of springs or beams with attached proof mass to detect acceleration. One important factor that impacts how well these accelerometers detect and measure acceleration is their sensitivity. To explore and improve the sensitivity of MEMS accelerometers, the present work focuses on assessing several beam topologies with various cross-sectional forms, such as triangles, slanted squares, circles, and squares using COMSOL Multiphysics software. Triangular beams made of solid material demonstrated the highest sensitivity (15.68 nm/g), but hollow slanted squares exhibited notable sensitivity (148 nm/g). These results highlight how important the beam configuration and geometric parameters are in determining MEMS accelerometer sensitivity. Understanding this relationship helps researchers refine the design of MEMS accelerometers, leading to improved performance and accuracy in motion and vibration related measurements. © 2024 IEEE.