Conference Papers
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Item Effect of flexure beam geometry and material on the displacement of piezo actuated diaphragm for micropump(Institute of Physics Publishing helen.craven@iop.org, 2018) Roopa, R.; Karanth P, K.P.; Kulkarni, S.M.In this paper, we present a COMSOL analysis of flexure diaphragm for piezo actuated valveless micropump. Diaphragms play an important role in micropumps, till now plane diaphragms are commonly used in micropumps. Use of compliant flexure hinges in diaphragm and other MEMS application is one of the new approach to achieving high deflection in diaphragm at low operating voltage. Flexures hinges in diaphragm acts as simply supported beam. Out-off plane compliance value and stiffness is considered for the selection of proper flexure for diaphragm. Diaphragm material also plays an important role in the diaphragm central deflection. Factor considered for diaphragm material selection is resilience; it is the ratio of yield stress to static modulus. Higher is the resilience will leads to higher deflection generated, it also imparts good compliance. Based on the resilience beryllium copper, stainless steel and brass materials are selected for diaphragm analysis. Simulations have been performed using COMSOL multiphysics. This study reports the effect of flexure hinge geometry and diaphragm material on the central deflection of diaphragms and compared with existing plane diaphragm. Simulation results illustrates that the deflection of three flexure diaphragm with 2mm width and 2mm length flexure is 6.75μm for stainless steel, 10.89 for beryllium copper and 12.10μm for brass, at 140V which is approximately twice that of plane diaphragm deflection. The maximum in both plane and three flexure diaphragm deflection is obtained for brass diaphragm compared to stainless steel and beryllium copper. © Published under licence by IOP Publishing Ltd.Item Effect of flexure hinge geometry on central deflection of piezo actuated diaphragm for micropump(Institute of Electrical and Electronics Engineers Inc., 2018) Roopa, R.; Karanth P, K.P.; Kulkarni, S.M.This paper discusses the effect of flexure hinge geometry on piezo actuated diaphragms for the micropump application. Use of flexure hinges in the diaphragm is one of the approaches to increase the diaphragm central deflection, selection of proper flexure hinges for out-of-plane application is important. COMSOL analysis is used to study the effect of flexure hinge geometry on the central deflection and stress distribution in the diaphragm. Rectangle hinge, circular cut-out hinge and corner fillet flexure hinges were chosen with a constant width of 1.5mm and 2mm length. In the present investigation, the central deflection of the diaphragm with different flexure hinges are studied and compared with a plane diaphragm with respect to actuating voltage. The simulation result shows that the maximum deflection is obtained from circular cut-out flexure diaphragm i.e. 9.35μm. Whereas stress distribution in circular flexure hinge diaphragm is more compared to rectangular flexure hinge diaphragm, which may lead to failure. Therefore rectangular flexure diaphragm has the advantage of minimum stress concentration with higher deflection compared to corner fillet and circular flexure. The deflection of rectangle flexure hinge diaphragm is 8.65μm which is 64% more compared to plane diaphragm. © 2017 IEEE.