Conference Papers
Permanent URI for this collectionhttps://idr.nitk.ac.in/handle/123456789/28506
Browse
Search Results
Item Fabrication and characterisation of RF MEMS capacitive switches tuned for X and Ku bands(Inderscience Publishers, 2018) Shajahan, E.S.; Bhat, M.S.Microelectromechanical systems (MEMS) capacitive switches discussed in this paper employ electrostatic actuation to perform switching. Capacitive switches employ inductive tuning for excellent switching characteristics in X and Ku bands. Employing inductive tuning is found to increase the switch beam inductance by a few tens of pico-henry. This enhances the Q factor and enables tuning of isolation over a narrow band of frequencies. Beam inductance can be extracted from the simulated isolation characteristics of the switch by curve fitting. This paper presents design, fabrication and characterisation of inductive tuned MEMS capacitive switches tuned for X and Ku bands. The devices are fabricated on high resistive (10 KΩ) silicon substrate by a five mask process. The characterisation of the fabricated devices are conducted using Cascade probe station and high frequency Power network analyser. Characterisation results show an actuation voltage of 18.5 volts. The insertion - loss and isolation are better than 0.5 dB and -40 dB respectively in the 8-18 GHz band. © © 2018 Inderscience Enterprises Ltd.Item High Isolation Single Pole Four Throw RF MEMS Switches for X band(Institute of Electrical and Electronics Engineers Inc., 2018) Shajahan, E.S.; Bhat, M.S.This work presents low loss RF-MEMS Single Pole Four Throw (SP4T) switch for X band. The present work is inspired from the fact that electrostatically actuated RF MEMS switches have superior RF performance over the state-of-the-art solid-state switches. Since an optimized design for Single Pole Multi Throw (SPMT) switch is difficult to realize, this work proposes a new design to achieve low loss and high isolation. The idea is to realize a combination of SPST (Single-Pole-Single-Throw) series and shunt switching in each arm of the SP4T model. The actuation voltage, isolation and insertion losses are optimized. The electro-mechanical modeling of the proposed device is done in CoventorWare and electro-magnetic modeling in HFSS. The simulation of the proposed design shows an actuation voltage of 12 V for capacitive shunt configuration and 13.75 V for the lateral series switch. The insertion loss and isolation are better than 1 dB and -50 dB respectively in the X band. The excellent RF characteristics make the switches suitable as MEMS varactors for high frequency applications and in tunable MEMS filters and phaseshifters. © 2018 IEEE.