Browsing by Author "Gali, S."

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    Photonic Integrated Piezo-MEMS (Pip-MEMS) Device for 1D Beam Scanning
    (Springer Science and Business Media Deutschland GmbH, 2024) Venkatachalam, P.; Yumnam, D.; Gali, S.; Swamy, K.B.M.; Selvaraja, S.K.
    We demonstrate a 1D beam scanning device with a maximum scan angle of 6.6° at 18.91 kHz for a 0.5 mm long PZT-on-SiN waveguide integrated Piezo-MEMS cantilever. © The Author(s), under exclusive license to Springer Nature Switzerland AG 2024.