Karanth P, P.N.Desai, V.Kulkarni, S.M.2026-02-052010Microsystem Technologies, 2010, 16, 4, pp. 641-6469467076https://doi.org/10.1007/s00542-009-0996-xhttps://idr.nitk.ac.in/handle/123456789/27481Micro pumps are essential components of micro devices such as drug delivery systems. Large numbers of pumps have been proposed based on different actuating principles. Piezoelectric actuation offers advantages such as reliability and energy efficiency. Lead zirconate titanate (PZT) based piezoelectric actuation for micro pumps is predominantly explored despite its disadvantages such as brittle nature, low straining and difficulties in processing. Polymer piezoelectric materials like polyvinylidene fluoride (PVDF) could be promising replacements for PZT owing to their availability in form of films and good strain coefficients. Very limited literature on micro pump with PVDF as an actuator is available. In this paper, finite element analysis (FEA) model of a micro pump actuator using single and multilayer PVDF for actuation is developed in ANSYS. The model takes into account the influence of driving voltage and actuator. Copyright © Springer-Verlag 2009.Driving voltagesDrug delivery systemEssential componentFinite element analysisLead zirconate titanateMicro devicesMicro pumpPiezoelectric actuationPolyvinylidene fluoride filmsPolyvinylidene fluoridesPZTStrain coefficientDrug deliveryEnergy efficiencyFinite element methodMultilayersPiezoelectric actuatorsPiezoelectric materialsPiezoelectricityPolymer filmsSemiconducting lead compoundsStrainPumps