Sahu, S.K.Reddy, S.K.Singh, M.Avrutin, E.2026-02-042022IEEE Photonics Technology Letters, 2022, 34, 18, pp. 953-95610411135https://doi.org/10.1109/LPT.2022.3195666https://idr.nitk.ac.in/handle/123456789/22406A nanoscale 3D hybrid plasmonic waveguide (HPWG) refractive index-cum-temperature sensor has been proposed and simulated in this work. The aqueous analyte (benzene C6H6) sensing is possible over the wavelength range from 1.18∼μ m to 2.2∼μ m. A well-known refractive index (RI) sensing method (or wavelength interrogation) is considered for the proposed Si-TiO2-SiO2-Au nanostructure. The sensor design includes, titanium dioxide (TiO2) layer deposited over the silicon dioxide to enhance the overall sensitivity of the HPWG sensor. The finite element method (FEM) based 3D-numerical simulations are performed for an IR band signal, predicting 1022.75 nm/RIU device sensitivity and 2.95 nm/°C temperature sensitivity. The proposed sensor is suitable for next-generation on-chip biochemical sensing applications with nanoscale dimensions, low cost, and high sensitivity. © 1989-2012 IEEE.Finite element methodGoldIntegrated opticsNanophotonicsNanosensorsNumerical methodsOptical sensorsOptical waveguidesPlasmonicsRefractive indexSilicaSiliconSilicon oxidesTemperature sensorsTitanium dioxideAnalytesFinite element analyseHybrid plasmonic waveguidesNano scaleRefractive index sensingSensitivitySurface-plasmonTemperature sensingWavelength rangesSurface plasmons