Venkatachalam, P.Yumnam, D.Gali, S.Swamy, K.B.M.Selvaraja, S.K.2026-02-062024Springer Proceedings in Physics, 2024, Vol.402, , p. 284-2889308989https://doi.org/10.1007/978-3-031-63378-2_47https://idr.nitk.ac.in/handle/123456789/29034We demonstrate a 1D beam scanning device with a maximum scan angle of 6.6° at 18.91 kHz for a 0.5 mm long PZT-on-SiN waveguide integrated Piezo-MEMS cantilever. © The Author(s), under exclusive license to Springer Nature Switzerland AG 2024.Beam ScanningCantileverWaveguide