Rao, K.Bangera, K.V.Shivakumar, G.K.2026-02-052013Materials Science in Semiconductor Processing, 2013, 16, 2, pp. 269-27313698001https://doi.org/10.1016/j.mssp.2012.10.015https://idr.nitk.ac.in/handle/123456789/26804The effects of substrate temperature and post deposition annealing on the structural, optical and electrical properties of vacuum deposited ZnSe thin films are presented here. The chemical composition of the films varied drastically with substrate temperature which in turn caused changes in various properties of the films. The grain size of the films increased with substrate temperature and also after annealing. The electrical properties of the films were found to be varying as a function of chemical composition and grain size. © 2012 Elsevier Ltd.Chemical compositionsGrain sizeOptical and electrical propertiesPost deposition annealingSubstrate temperatureVapour depositionZinc selenideZnSe thin filmsAnnealingDepositsGrain size and shapeHall effectOptical propertiesSubstratesThin filmsVacuumVapor depositionElectric properties