National Institute of Technology KarnatakaJagannathan T. K.Kishor Kumar M. J2022-01-192022-01-192021-05-28https://idr.nitk.ac.in/handle/123456789/16975Patent Filed Date: 23.11.2019 ; Published Date: 28.05.2021enCOMPOSITIONFABRICATINGHIGH-K DIELECTRIC MATERIALMETHOD AND COMPOSITION FOR FABRICATING A HIGH-K DIELECTRIC MATERIALOther