Reddy, S.K.Singh, M.2026-02-042022IEEE Sensors Journal, 2022, 22, 3, pp. 2062-20691530437Xhttps://doi.org/10.1109/JSEN.2021.3135762https://idr.nitk.ac.in/handle/123456789/22687Refractive index (RI) sensors have an overarching compass jutting into the biological and chemical fields and hence are efficacious. The evinced work appertains with an infra-red (IR)-band ethanol sensor, perceived with a Metal-Insulator-Semiconductor-Insulator-Metal (MISIM) waveguide structure consisting of porous-silicon as the absorbing/sensing medium. It is validated through modeling, and numerical simulations that the enhanced electric field confined into a low index slot undergoes a red-shift in wavelength in the presence of harmful ethanol. The red-shift in wavelength can be controlled by changing the silicon porosity and the physical dimensions of the hybrid waveguide. With finite-element-method based COMSOL Multiphysics simulations, we have obtained the optimized metrics of the sensor namely sensitivity (S TM) = 400.43-612.43 nm/RIU, figure of merit (FoM) = 12.42-19.46/RIU, and quality factor (Q-factor) = 46.8-52.9, for 10% to 25% p-Si porosity. The fabrication stages of the on-chip sensor are also articulated in brief. The detailed assessment shows that this sensor is a feasible choice for ethanol detection in hazardous environments. © 2001-2012 IEEE.EthanolFinite element methodMetal insulator boundariesMetalsOptical sensorsOptical waveguidesPlasmonicsPorosityPorous siliconQ factor measurementRefractionRefractometersSemiconductor insulator boundariesSurface plasmon resonanceEthanol sensorsHybrid plasmonic waveguidesInfrared bandsMetal-insulator-semiconductor-insulator-metalMetal-insulator-semiconductorsOn chipsQuality factorsRefractive index sensorSlot waveguideRefractive index