Kumar, R.R.Shukla, R.Pandey, S.K.Pandey, S.K.2026-02-052021Superlattices and Microstructures, 2021, 150, , pp. -7496036https://doi.org/10.1016/j.spmi.2020.106787https://idr.nitk.ac.in/handle/123456789/23364— This work reports the growth optimization and analysis of ZnO, Mg<inf>x</inf>Zn<inf>1-x</inf>O, and Cd<inf>x</inf>Zn<inf>1-x</inf>O thin films on silicon substrate using an electron beam evaporation system. The crystal phase purity, surface morphology, optical and electrical properties of deposited ZnO, Mg<inf>x</inf>Zn<inf>1-x</inf>O, and Cd<inf>x</inf>Zn<inf>1-x</inf>O thin films were studied. X-ray diffraction (XRD) spectra revealed that the deposited films were polycrystalline in nature with preferred (002) crystal orientation. Field emission scanning electron microscope study showed a dense-packed grained structure with an exact symmetrical distribution. The root-mean-square roughness of 3.03 nm was perceived by atomic force microscopy measurement for Mg<inf>x</inf>Zn<inf>1-x</inf>O thin-film, indicating good morphology of the deposited film. Photoluminescence measurement demonstrated a near-band-edge emission peak around 363 nm for ZnO thin film. The energy band gap obtained for ZnO, Mg<inf>x</inf>Zn<inf>1-x</inf>O, and Cd<inf>x</inf>Zn<inf>1-x</inf>O were 3.36 eV, 3.86 eV, and 2.89 eV, respectively, as measured by Ultraviolet–Visible spectroscopy. The higher amount of photocurrent was detected in illumination condition compared to dark condition with responsivity 0.54 AW-1 for ZnO films, making it suitable for photodiodes applications. © 2020 Elsevier LtdAtomic force microscopyCrystal orientationElectron beamsEnergy gapII-VI semiconductorsMetallic filmsMorphologyOxide mineralsPhotocurrentsPhotodiodesScanning electron microscopySemiconductor alloysSemiconductor quantum wellsSurface morphologyZinc oxideElectron beam evaporationExperimental investigationsField emission scanning electron microscopesIllumination conditionsNear band edge emissionsOptical and electrical propertiesPhotoluminescence measurementsRoot mean square roughnessThin films