Design and analysis of a capacitively-coupled clamped-clamped MEMS resonator
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Date
2014
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Institute of Electrical and Electronics Engineers Inc.
Abstract
This document details the design, implementation and analysis of a clamped-clamped capacitively-coupled beam resonator with a high Q-factor [>10000] in the VHF band [30-300MHz]. The document also draws a parallel between simulation results and theoretical results of key performance metrics of the design. © 2014 IEEE.
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Proceedings - 2014 6th International Conference on Computational Intelligence and Communication Networks, CICN 2014, 2014, Vol., , p. 155-161