Influence of substrate temperature and post deposition annealing on the properties of vacuum deposited ZnSe thin films
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Date
2013
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Abstract
The effects of substrate temperature and post deposition annealing on the structural, optical and electrical properties of vacuum deposited ZnSe thin films are presented here. The chemical composition of the films varied drastically with substrate temperature which in turn caused changes in various properties of the films. The grain size of the films increased with substrate temperature and also after annealing. The electrical properties of the films were found to be varying as a function of chemical composition and grain size. © 2012 Elsevier Ltd.
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Keywords
Chemical compositions, Grain size, Optical and electrical properties, Post deposition annealing, Substrate temperature, Vapour deposition, Zinc selenide, ZnSe thin films, Annealing, Deposits, Grain size and shape, Hall effect, Optical properties, Substrates, Thin films, Vacuum, Vapor deposition, Electric properties
Citation
Materials Science in Semiconductor Processing, 2013, 16, 2, pp. 269-273