Review on the deposition, structure and properties of high entropy oxide films: current and future perspectives

Abstract

High entropy oxides (HEOs) have captivated significant concentration due to their unique properties. Manipulation of configurational entropy is the main key for extraordinary behaviours, leading to unprecedented material design and innovations. Substantial research has been conducted on HEO bulk systems, but films are still in the cradle stage. Inspired by the ground-breaking results of HEOs, a novel form of films named high entropy oxides films (HEOFs) are being fabricated. The focus in this review is on the fabrication process, structure and properties of HEOFs with attention to their strengths and liabilities. Iconic investigations from recent articles are highlighted. The first overview is provided on how HEOFs are fabricated and interesting phenomena such as the impact of processing parameters, the role of dopants on the film are discussed. This review also highlights the structural–microstructural appearance and physical properties, concluding with future possibilities and applications. © 2022, Indian Academy of Sciences.