System And Method For Designing Microheater Achieving High Temperature Uniformity
Date
2023-03-17
Authors
Ramshanker, N
Ganapathi, Kolla Lakshmi
Sangeneni, Mohan
Bhat, Shankaranarayana M
National Institute of Technology Karnataka, Surathkal
Journal Title
Journal ISSN
Volume Title
Publisher
Indian Patent Office, Chennai
Abstract
Description
Patent Filed Date: 15.12.2022 Published Date: 17.03.2023
Keywords
System and Method, Microheater Achieving, High Temperature Uniformity