Analysis of Suspension Beams for MEMS Accelerometers: The Effect of Geometric Parameters on the Sensitivity

Abstract

MEMS accelerometers have revolutionized accelerometer technology with their compact size, low power consumption and improved precision, making them suitable for measuring the motion and vibration. MEMS accelerometers rely on the movement of springs or beams with attached proof mass to detect acceleration. One important factor that impacts how well these accelerometers detect and measure acceleration is their sensitivity. To explore and improve the sensitivity of MEMS accelerometers, the present work focuses on assessing several beam topologies with various cross-sectional forms, such as triangles, slanted squares, circles, and squares using COMSOL Multiphysics software. Triangular beams made of solid material demonstrated the highest sensitivity (15.68 nm/g), but hollow slanted squares exhibited notable sensitivity (148 nm/g). These results highlight how important the beam configuration and geometric parameters are in determining MEMS accelerometer sensitivity. Understanding this relationship helps researchers refine the design of MEMS accelerometers, leading to improved performance and accuracy in motion and vibration related measurements. © 2024 IEEE.