Investigation of phosphorus-doping of MgZnO thin films using efficient spin-on dopant process

Abstract

Phosphorus doped MgZnO thin films were prepared using the RF sputtering technique on a Si wafer, followed by spin-on doping (SOD) and annealing. The SOD is a cheap and non-destructive process in which the dopant film is spun on a Si wafer and placed in the vicinity of deposited undoped MgZnO thin film at a high temperature to perform doping. After doping, the MgZnO thin films were annealed at temperatures such as 700, 800, and 900°C, which significantly improved morphological, structural, and optical properties. The atomic force microscopy and scanning electron microscopy measurements revealed that phosphorus-doped MgZnO thin films annealed at 800–900°C have good morphology and large grains. X-ray diffraction spectra demonstrated the (002) orientation of MgZnO thin films. The photoluminescence spectra measured at 20 K demonstrated the acceptor bound exciton peak at 3.47 eV and acceptor binding energy of around 64.34 meV, indicating the formation of shallow acceptor levels by phosphorus doping of MgZnO thin films using the SOD process. In Raman spectroscopy measurement, the peak of E<inf>2</inf>high phonons mode of MgZnO wurtzite structure was observed around 436 cm−1. The FWHM value of this peak reduces with augmentation annealing temperature, demonstrating improvement in crystallinity. X-ray photoelectron spectroscopy measurement demonstrated the presence of phosphorus atoms in the SOD processed MgZnO thin films, which is again verified by Fourier-transform infrared spectroscopy measurement showing vibration modes of P–O bonds. It was observed that the different properties of SOD-prepared phosphorus-doped MgZnO films were superior to the film prepared using the alternate costly and destructive ion-implantation technique. These findings have revealed that high-quality phosphorus-doped p-type MgZnO thin films by the SOD process are very suitable for UV optoelectronic device applications. © 2023 Elsevier B.V.