Fabrication of Ag/PDMS-TiO2 flexible piezoresistive pressure sensor
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Date
2020
Journal Title
Journal ISSN
Volume Title
Publisher
Elsevier B.V.
Abstract
In this study, TiO<inf>2</inf> nanorods are grown on a flexible Polydimethylsiloxane (PDMS) substrate using the hydrothermal technique. The morphological, structural, compositional, optical properties and pressure sensing are investigated in detail by FESEM, XRD, EDX, UV–visible spectrophotometer, and piezoelectric studies. XRD demonstrates the pure rutile phase with a tetragonal structure is formed from deposited TiO<inf>2</inf> thin film. FESEM images confirm the TiO<inf>2</inf> nanorods with average dimensions length ~620 nm and diameter ~97 nm whereas the optical spectrum shows the strong light absorption in the UV region with bandgap 3.54 eV. The voltage is measured as a response to the applied mechanical load and the sensitivity of the pressure sensor is obtained as 2.56 × 10?5 V/N. The flexible pressure sensors (Ag/PDMS-TiO<inf>2</inf>) senses over a large pressure range and shows a linear response because of the adjustments in the volume of dielectric that makes the pressure inside the dielectric cavity to vary. © 2020 Elsevier B.V.
Description
Keywords
Absorption spectroscopy, High-k dielectric, Light absorption, Nanorods, Optical properties, Oxide minerals, Polydimethylsiloxane, Pressure sensors, Silicones, Titanium dioxide, Uranium metallography, X ray diffraction, Dielectric cavities, Flexible pressure sensors, Hydrothermal techniques, Piezoelectric studies, Piezoresistive pressure sensors, Polydimethylsiloxane (PDMS) substrates, Tetragonal structure, Visible spectrophotometers, Vanadium metallography
Citation
Physica B: Condensed Matter, 2020, 597, , pp. -